Brisk Mechanized of OSTE Polymer RF-Mems Components Nallakumar M1, Jayendran M2 1Research Scholar, Department of Chemistry, AMET University, Chennai 2Assistant Professor, Department of Chemistry, Govt. Arts College, Coimbatore Online published on 24 October, 2017. Abstract This paper reports the first RF-MEMS component in OSTE polymer. Three OSTE-based ridge gap resonators were fabricated by direct, high aspect ratio, photostructuring. The OSTE polymer's good adhesion to gold makes it suitable for RF-MEMS applications. The OSTE ridge gap resonators differ in how they were coated with gold. The OSTE-based devices are compared to each other as well as to Sibased, SU8-based, and CNT-based devices of equal design. The OSTE-based process was performed outside the cleanroom, and with a fast fabrication process (∼1 h). The OSTE-based device performance is on par with that of the other alternatives in terms of frequency, attenuation, and Q-factor. Top Keywords Polymer, Photostructure, Communication, Band Width, OSTE. Top |